Nanoscale Manufacturing and Measurement Labs

Nano-Opto-Bio Engineering Laboratory (Nobel)
Director: Prof. Shaochen Chen
Located in ETC 7.104, this lab is equipped with state-of-the-art laser facilities including several lasers, optics, and other photonic devices for micro- and nano-scale materials processing and surface analysis. Major equipment including a Q-switched Nd:YAG laser (Continuum, 7 ns pulse, 6.5 W, wavelengths of 1064 nm, 532 nm, 355 nm, and 266 nm), an excimer laser (Lamda Physics, 248 nm, 10 ns pulse), a digital scilloscope (HP, 500MHz, 1Gsa/s), one digital delay generator (Stanford Research Systems, 1 pico-second time resolution), and one optical microscope (Olympus, 800 lines/mm resolution) with a CCD and TV monitor. Dr. Chen's group has access to the following shared laboratory facilities: class-100 clean room CMOS and MEMS fabrication facility at the Microelectronics Research Center (MRC), nanofabrication facility in the Center for Nano and Molecular Science and Technology (CNM). Lots of optics for various wavelength and power level (CVI, Newport, etc.) Laser power meters (Molectron)
Home-made beam shapers Two fast photodetectors Three optical tables (TMC) One syringe pump for nano- to micro-liter scale pumping (Minco) 5 Dell computers (Window NT), Canon scanner, and laser printer.

• Micro-Nano Scale Thermo-Fluids Laboratory
  Director: Dr. Li Shi
  Tube furnace for chemical vapor deposition (CVD) growth of carbon nanotubes; Furnace for fusion bonding of glass wafers Janis continuous flow optical cryostat;
  Omicron variable temperature (75-500K) UHV STM/multimode optical beam deflection AFM; Low-noise current and voltage amplifiers; SRS lock-in amplifiers; Agilent DC power supplies and multimeters; Dr. Shi's group has access to the following shared laboratory facilities: class-100 clean room CMOS and MEMS fabrication facility at the Microelectronics Research Center (MRC), nanofabrication facility in the Center for Nano and Molecular Science and Technology (CNM).
• Desi Kovar shares facilities with MF. Becker (ECE) and JW Keto (Physics) for nanoparticle production and nanostructured film deposition. These facilities include:
  • Excimer Laser Ablation Lab (located in the Physics Building)
    Excimer laser 200 Hz, 80 W, KrF (248 nm) laser
    Laser spectroscopy at nanoscale NSOM and micro-luminescence using both narrow band or femtosecond Ti:Saph laser source
    Pilot nanoparticle production: Powder feed, aerosol generator, ablation cell and collection onto substrates in technical vacuum.
  • Nanoparticle nanocomposite fab.
    UHV vacuum system with chambers for nanoparticle
    collection onto substrates, and for PVD using PLD and
    ion beam sputtering.
    

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